| Author: |
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Alain C. Diebold
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| Title: |
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Handbook of Silicon Semiconductor Metrology |
| Moochable copies: |
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No copies available |
| Amazon suggests: |
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| Topics: |
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| Published in: |
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English |
| Binding: |
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Hardcover |
| Pages: |
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896 |
| Date: |
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2001-06-29 |
| ASIN/ISBN: |
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0824705068 |
| Publisher: |
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CRC |
| Weight: |
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3.73 pounds |
| Size: |
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7.26 x 10.12 x 1.83 inches |
| Edition: |
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1 |
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| Description: |
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Product Description
A complete reference on silicon semiconductor metrology. Contains nearly 1300 references, more than 300 equations, and nearly 500 drawings, photographs and micrographs. Explains run-to-run and real-time control, considers how to improve physical measurement methods to meet more exact requirements, and more.
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| URL: |
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http://bookmooch.com/0824705068 |
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