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Alain C. Diebold : Handbook of Silicon Semiconductor Metrology
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Author: Alain C. Diebold
Title: Handbook of Silicon Semiconductor Metrology
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Published in: English
Binding: Hardcover
Pages: 896
Date: 2001-06-29
ASIN/ISBN: 0824705068
Publisher: CRC
Weight: 3.73 pounds
Size: 7.26 x 10.12 x 1.83 inches
Edition: 1
Description: Product Description
A complete reference on silicon semiconductor metrology. Contains nearly 1300 references, more than 300 equations, and nearly 500 drawings, photographs and micrographs. Explains run-to-run and real-time control, considers how to improve physical measurement methods to meet more exact requirements, and more.
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